美国(Polysilicon)多晶硅生产工艺及多晶硅的用途
1、改善蚀刻多晶硅的均匀性和减少其蚀刻速率变化的方法
2、多晶硅界定阶跃恢复器件
3、多晶硅栅极蚀刻后的无机抗反射涂层的干式各向同性移除
4、多晶硅表面金属杂质的清除
5、由多晶硅炉料制备熔硅熔料的方法
6、用多晶硅原料制备熔硅的方法
7、引入堆叠箱式电容单元的数兆位动态存储器的劈开－多晶硅CMOS工艺
8、一种多晶硅自对准双极器件及其制造工艺
9、在多晶硅上具有平滑界面的集成电路
10、三层多晶硅嵌入式非易失性存储器单元及其制造方法
11、用多晶硅炉料制备硅熔体的方法
12、用多晶硅掩模和化学机械抛光制造不同栅介质厚度的工艺
13、用场效应管和双极基极多晶硅层制造多晶硅电容器的方法
14、制作多晶硅－多晶硅/MOS叠层电容器的方法
15、高质量单晶制造中堆积和熔化多晶硅的方法
16、横向多晶硅PIN二极管及其制造方法
17、多晶硅化学气相沉积方法和装置
18、为快速擦写存储器装置的多晶硅提供掺杂质浓度的方法
19、为快速电可擦除可编程只读存储器单元形成相对于有源区自对准的浮动栅多晶硅层的方法
20、低温下用顺序横向固化制造单晶或多晶硅薄膜的系统和方法
21、用顺序横向固化制造均匀大晶粒和晶粒边界位置受控的多晶硅薄膜半导体的方法
22、挡板晶圆及其所用的随机定向多晶硅
23、闪存装置制造中用于多晶硅-1定义非临界互补掩膜方法
24、多晶硅的制备
25、在屏蔽的栅极场效应晶体管中形成多晶硅层间电介质的结构和方法
26、用于增加多晶硅熔化速率的间歇式加料技术
27、具有多晶硅源极接触结构的沟槽MOSFET器件
28、具有电压维持区域并从相反掺杂的多晶硅区域扩散的高电压功率MOSFET
29、用场效应管和双极基极多晶硅层制造多晶硅电容器的方法
30、超小粒径多晶硅的结构和方法
31、用于制造垂直DRAM中的钨/多晶硅字线结构的方法及由此制造的器件
32、由多晶硅装料制备熔化的硅熔体的方法和装置
33、采用多晶硅栅和金属栅器件的半导体芯片
34、在双金属/多晶硅氧化物氮化物氧化物硅阵列中的联结及选取步骤
35、用于动态阈值电压控制的多晶硅背栅SOI MOSFET
36、用于宽编程的双金属/多晶硅氧化物氮化物氧化物硅存储器单元
37、玻璃衬底的预多晶硅被覆
38、由P+或者N+掺杂多晶硅形成其传输门电路的图像传感器像素
39、光电二极管上设有多晶硅层的图像传感器及像素
40、具有高性能集成电路多晶硅凝集熔消组件的互补金属氧化物半导体的工艺
41、形成多晶硅的方法和在硅基材料中的MOSFET器件
42、形成多晶硅结构
43、具有多晶硅浮动隔离层的镜像存储单元晶体管对
44、具有单层多晶硅的镜像非易失性存储器单元晶体管对
45、精密多晶硅电阻器工艺
46、双胆碱和三胆碱在涂石英多晶硅和其它材料清洁中的用法
47、双掺杂多晶硅及锗化硅的蚀刻
48、利用双多晶硅的位线注入
49、低电压单层多晶硅电可擦编程只读存储器(EEPROM)存储单元
50、具有金属和多晶硅栅电极的高性能电路及其制造方法
51、具有发射极多晶硅源/漏区的EEPROM单元的制造
52、用于增加多晶硅熔化速率的间歇式加料技术
53、尤其在闪存中用于刻蚀多晶硅上钨硅化物的方法
54、用于产生结晶方向受控的多晶硅膜的系统和方法
55、用于使低温多晶硅薄膜面板平面化的多晶硅平面化溶液
56、具有多晶硅浮置隔片的镜像存储单元晶体管对的制造方法
57、控制多晶硅移除的方法
58、与CMOS兼容的单层多晶硅非易失性存储器
59、沟槽式多晶硅二极管
以下是美国(Polysilicon)多晶硅技术（全英文）
1、Polysilicon Deposition and Anneal Process Enabling Thick Polysilicon Films  for MEMS Applications
2、SOI MOSFET DEVICE WITH REDUCED POLYSILICON LOADING ON ACTIVE AREA
3、POLYSILICON FILM HAVING SMOOTH SURFACE AND METHOD OF FORMING THE SAME
4、METHOD FOR FABRICATING POLYSILICON FILM, A GAS PHASE DEPOSITION APPARATUS  AND AN ELECTRONIC DEVICE FORMED THEREBY
5、METHOD OF MANUFACTURING SOLAR-GRADE POLYSILICON INGOT WITH RELEVANT  INDUCTION APPARATUS
6、Local Oxidation of Silicon Planarization for Polysilicon Layers Under Thin  Film Structures
7、LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF POLYSILICON ON A WAFER
8、Methods for forming MOS devices with metal-inserted polysilicon gate stack
9、ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKED BY  RESIST
10、CMOS IMAGE DEVICE WITH POLYSILICON CONTACT STUDS
11、DIRECTIONAL SOLIDIFICATION METHOD FOR INCESSANTLY PRODUCING THE  POLYSILICON INGOT AND THE RELATIVE INGOT CASTING PPARATUS
12、POLISHING COMPOSITION AND METHOD FOR HIGH SELECTIVITY POLYSILICON CMP
13、METHOD OF SIMULTANEOUSLY SILICIDING A POLYSILICON GATE AND SOURCE/DRAIN OF  A SEMICONDUCTOR DEVICE, AND RELATED DEVICE
14、FORMING SILICIDED GATE AND CONTACTS FROM POLYSILICON GERMANIUM AND  STRUCTURE FORMED
15、Method for reducing polysilicon gate defects in semiconductor devices
16、METHODS AND APPARATUS FOR FORMING A POLYSILICON CAPACITOR
17、INTEGRATION SCHEMES FOR FABRICATING POLYSILICON GATE MOSFET AND HIGH-K  DIELECTRIC METAL GATE MOSFET
18、Deep Implant Self-Aligned To Polysilicon Gate
19、METHODS AND APPARATUSES FOR REMOVING POLYSILICON FROM SEMICONDUCTOR  WORKPIECES
20、POLYSILICON CONDUCTIVITY IMPROVEMENT IN A SALICIDE PROCESS TECHNOLOGY
21、Silicide-Interface Polysilicon Resistor
22、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR DISPLAY AND METHOD OF  FABRICATING THE SAME
23、Method of fabricating gate electrode having polysilicon film and wiring  metal film
24、Polysilicon gate formation by in-situ doping
25、Polysilicon gate formation by in-situ doping
26、Method for fabricating polysilicon layer with large and uniform grains
27、UNDOPED POLYSILICON METAL SILICIDE WIRING
28、METHOD FOR FABRICATING BOTTOM-GATE LOW-TEMPERATURE POLYSILICON THIN FILM  TRANSISTOR
29、MASK FOR FORMING POLYSILICON AND A METHOD FOR FABRICATING THIN FILM  TRANSISTOR USING THE SAME
30、Method of forming polysilicon, thin film transistor using the polysilicon,  and method of fabricating the thin film transistor
31、Forming Polysilicon Regions
32、Polysilicon Dummy Wafers and Process Used Therewith
33、ZERO INTERFACE POLYSILICON TO POLYSILICON GATE FOR SEMICONDUCTOR DEVICE
34、Split gate formation with high density plasma (HDP) oxide layer as  inter-polysilicon insulation layer
35、ZERO INTERFACE POLYSILICON TO POLYSILICON GATE FOR FLASH MEMORY
36、NON-VOLATILE MEMORY DEVICE WITH POLYSILICON SPACER AND METHOD OF FORMING  THE SAME
37、DETECTION OF CLEARANCE OF POLYSILICON RESIDUE
38、Trench polysilicon diode
39、METHOD FOR AVOIDING POLYSILICON DEFECT
40、METHOD FOR FABRICATING LANDING POLYSILICON CONTACT STRUCTURES FOR  SEMICONDUCTOR DEVICES
41、Semiconductor Device Having a Random Grained Polysilicon Layer and a  Method for its Manufacture
42、DOUBLE-DOPED POLYSILICON FLOATING GATE
43、Electron mobility enhancement for MOS devices with nitrided polysilicon  re-oxidation
44、POLYSILICON CONTAINING RESISTOR WITH ENHANCED SHEET RESISTANCE PRECISION  AND METHOD FOR FABRICATION THEREOF
45、Method For Selective CMP Of Polysilicon
46、POLYSILICON THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD  THEREOF
47、METHOD OF EVALUATING THE UNIFORMITY OF THE THICKNESS OF THE POLYSILICON  GATE LAYER
48、Method and apparatus for strapping two polysilicon lines in a  semiconductor integrated circuit device
49、SILICIDED POLYSILICON SPACER FOR ENHANCED CONTACT AREA
50、Method for fabricating a polysilicon layer having large and uniform grains
51、Non-volatile memory cells having a polysilicon-containing, multi-layer  insulating structure, memory arrays including the same and methods of  operating the same
52、PLANARIZATION METHOD USING HYBRID OXIDE AND POLYSILICON CMP
53、FABRICATION OF CCD IMAGE SENSORS USING SINGLE LAYER POLYSILICON
54、Polysilicon levels for silicided structures including MOSFET gate  electrodes and 3D devices
55、Methods of etching polysilicon and methods of forming pluralities of  capacitors
56、TAPERED VOLTAGE POLYSILICON DIODE ELECTROSTATIC DISCHARGE CIRCUIT FOR  POWER MOSFETS AND ICs
57、Polysilicon thin film transistor and method of fabricating the same
58、DUAL POLYSILICON GATE OF SEMICONDUCTOR DEVICE WITH MULTI-PLANE CHANNEL AND  FABRICATION METHOD THEREOF
59、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR
60、Lateral trench MOSFET with direct trench polysilicon contact and method of  forming the same
61、E-Fuse and Method for Fabricating E-Fuses Integrating Polysilicon Resistor  Masks
62、METHOD OF FORMING POLYSILICON PATTERN
63、Method For Cleaning A Polysilicon Fraction
64、Method of removing a photoresist pattern, method of forming a dual  polysilicon layer using the removing method and method of manufacturing a  semiconductor device using the removing
65、Method for fabricating polysilicon film
66、METHOD FOR FABRICATING DOPED POLYSILICON LINES
67、METHOD OF CONTROLLING GRAIN SIZE IN A POLYSILICON LAYER AND IN  SEMICONDUCTOR DEVICES HAVING POLYSILICON STRUCTURE
68、SYSTEM AND METHOD FOR I/O ESD PROTECTION WITH POLYSILICON REGIONS  FABRICATED BY PROCESSES FOR MAKING CORE TRANSISTORS
69、Metal-insulator-metal-structured capacitor formed with polysilicon
70、MANUFACTURING EQUIPMENT FOR POLYSILICON INGOT
71、Process including silo-chloro passivation for etching tungsten silicide  overlying polysilicon
72、Process for etching tungsten silicide overlying polysilicon particularly  in a flash memory
73、Formation of high sheet resistance resistors and high capacitance  capacitors by a single polysilicon process
74、Method of enhancing gate lithography performance by polysilicon  chemical-mechanical polishing
75、POLYSILICON HARD MASK FOR ENHANCED ALIGNMENT SIGNAL
76、E-FUSE AND METHOD FOR FABRICATING E-FUSES INTEGRATING POLYSILICON RESISTOR  MASKS
77、Method of forming a polysilicon film and method of manufacturing a thin  film transistor including a polysilicon film
78、Polysilicon control etch-back indicator
79、Polysilicon thin film transistor device and method of fabricating the same
80、Increased polysilicon deposition in a CVD reactor
81、POLYSILICON FILM HAVING SMOOTH SURFACE AND METHOD OF FORMING THE SAME
82、METHOD AND STRUCTURE FOR SELF ALIGNED FORMATION OF A GATE POLYSILICON  LAYER
83、Method and Device For Comminuting and Sorting Polysilicon
84、Formation of a smooth polysilicon layer
85、Method for fabricating polysilicon liquid crystal display device
86、SOLID-STATE IMAGE SENSING DEVICE INCLUDING ANTI-REFLECTION STRUCTURE  INCLUDING POLYSILICON AND METHOD OF MANUFACTURING THE SAME
87、METHOD FOR CRYSTALLIZING AMORPHOUS SILICON INTO POLYSILICON AND MASK USED  THEREFOR
88、MASK FOR CRYSTALLIZING POLYSILICON AND A METHOD FOR FORMING THIN FILM  TRANSISTOR USING THE MASK
89、POLYSILICON STRUCTURE, THIN FILM TRANSISTOR PANEL USING THE SAME, AND  MANUFACTURING METHOD OF THE SAME
90、POLYSILICON STRUCTURE, THIN FILM TRANSISTOR PANEL USING THE SAME, AND  MANUFACTURING METHOD OF THE SAME
91、System and method for I/O ESD protection with floating and/or biased  polysilicon regions
92、Method and structure for a self-aligned silicided word line and  polysilicon plug during the formation of a semiconductor device
93、METHOD OF FABRICATING A POLYSILICON LAYER AND A THIN FILM TRANSISTOR
94、Slurry compositions, methods of polishing polysilicon layers using the  slurry compositions and methods of manufacturing semiconductor devices  using the slurry compositions
95、Non-volatile floating gate memory cells with polysilicon storage dots and  fabrication methods thereof
96、Trench polysilicon diode
97、LOW-VOLTAGE SINGLE-LAYER POLYSILICON EEPROM MEMORY CELL
98、CVD apparatus for depositing polysilicon
99、Polysilicon Conductor Width Measurement for 3-Dimensional FETs
100、Organic light emitting diode (OLED) display panel and method of forming  polysilicon channel layer thereof
101、METHOD OF MANUFACTURING A LOW TEMPERATURE POLYSILICON FILM
102、METHOD TO FORM LARGE GRAIN SIZE POLYSILICON FILMS BY NUCLEI-INDUCED SOLID  PHASE CRYSTALLIZATION
103、Low-temperature polysilicon display and method for fabricating same
104、STRUCTURE FOR MONITORING SEMICONDUCTOR POLYSILICON GATE PROFILE
105、LOW-VOLTAGE SINGLE-LAYER POLYSILICON EEPROM MEMORY CELL
106、METHODS FOR FABRICATING POLYSILICON FILM AND THIN FILM TRANSISTORS
107、LOW COST AND LOW DISHING SLURRY FOR POLYSILICON CMP
108、Method for controlling polysilicon removal
109、Integrated thermal characterization and trim of polysilicon resistive  elements
110、Low temperature polysilicon thin film transistor display and method of  fabricating the same
111、POLYSILICON THIN FILM FABRICATION METHOD
112、POLYSILICON ETCHING METHODS
113、METHOD OF FORMING POLYSILICON FILM USING A LASER ANNEALING APPARATUS
114、INTEGRATED CIRCUIT CONTAINING POLYSILICON GATE TRANSISTORS AND FULLY  SILICIDIZED METAL GATE TRANSISTORS
115、Methods of Forming Conductive Polysilicon Thin Films Via Atomic Layer  Deposition and Methods of Manufacturing Semiconductor Devices Including  Such Polysilicon Thin Films
116、INTEGRATED CIRCUIT CONTAINING POLYSILICON GATE TRANSISTORS AND FULLY  SILICIDIZED METAL GATE TRANSISTORS
117、Polysilicon thin film transistor and method of fabricating the same
118、Composition and methods removing polysilicon
119、MOS semiconductor devices having polysilicon gate electrodes and high  dielectric constant gate dielectric layers and methods of manufacturing  such devices
120、Method and structure for landing polysilicon contact
121、METHOD OF FORMING THIN FILM TRANSISTOR AND METHOD OF REPAIRING DEFECTS IN  POLYSILICON LAYER
122、MANUFACTURING METHOD OF POLYSILICON
123、DUAL WORK FUNCTION GATE ELECTRODES USING DOPED POLYSILICON AND A METAL  SILICON GERMANIUM COMPOUND
124、METHOD OF DEFINING POLYSILICON PATTERNS
125、SELECTIVE POLYSILICON STUD GROWTH
126、Methods of enabling polysilicon gate electrodes for high-k gate  dielectrics
127、METHOD OF FABRICATING POLYSILICON FILM
128、Method of forming polysilicon layers in a transistor
129、MOS device and a process for manufacturing MOS devices using a  dual-polysilicon layer technology with side contact
130、DOUBLE GATE TRANSISTORS HAVING AT LEAST TWO POLYSILICON PATTERNS ON A THIN  BODY USED AS ACTIVE REGION AND METHODS OF FORMING THE SAME
131、SEMICONDUCTOR DEVICE WITH ROBUST POLYSILICON FUSE
132、Methods of forming polysilicon-comprising plugs and methods of forming  FLASH memory circuitry
133、Maskless multiple sheet polysilicon resistor
134、Method of manufacturing polysilicon thin film and method of manufacturing  thin film transistor having the same
135、Single wafer thermal CVD processes for hemispherical grained silicon and  nano-crystalline grain-sized polysilicon
136、Method for forming low temperature polysilicon thin film transistor with  low doped drain structure
137、Method of manufacturing polysilicon thin film transistor plate and liquid  crystal display including polysilicon thin film transistor plate  manufactured by the method
138、Lateral Programmable Polysilicon Structure Incorporating Polysilicon  Blocking Diode
139、Method to selectively form SiGe P type electrode and polysilicon N type  electrode through planarization
140、Non-dispersive high density polysilicon capacitor utilizing amorphous  silicon electrodes
141、Integrated circuit containing polysilicon gate transistors and fully  silicidized metal gate transistors
142、FABRICATION METHOD OF A LOW-TEMPERATURE POLYSILICON THIN FILM TRANSISTOR
143、Electrically conductive line, method of forming an electrically conductive  line, and method of reducing titanium silicide agglomeration in  fabrication of titanium silicide over polysilicon transistor gate lines
144、Application of single exposure alternating aperture phase shift mask to  form sub 0.18 micron polysilicon gates
145、Method of forming dual polysilicon gate of semiconductor device
146、Method for the production of a micromechanical part preferably used for  fluidic applications, and micropump comprising a pump membrane made of a  polysilicon layer
147、Method of etching dual pre-doped polysilicon gate stacks using  carbon-containing gases additions
148、SOI MOSFET device with reduced polysilicon loading on active area
149、Method of making transistors and non-silicided polysilicon resistors for  mixed signal circuits
150、LOW TOLERANCE POLYSILICON RESISTOR FOR LOW TEMPERATURE SILICIDE PROCESSING
151、ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKED BY  RESIST
152、Semiconductor structure having multilayer of polysilicon and display panel  applied with the same
153、Cobalt/nickel bi-layer silicide process for very narrow line polysilicon  gate technology
154、ETCHING PROCESS TO AVOID POLYSILICON NOTCHING
155、Methods for forming a P-type polysilicon layer in a semiconductor device
156、Method of improved high K dielectric - polysilicon interface for CMOS  devices
157、Polysilicon film, thin film transistor using the same, and method for  forming the same
158、Method of improved high K dielectric - polysilicon interface for CMOS  devices
159、Method for increasing polysilicon grain size
160、Image sensor pixel having a transfer gate formed from P+ or N+ doped  polysilicon
161、Method of polycrystallization, method of manufacturing polysilicon thin  film transistor, and laser irradiation device therefor
162、METHOD OF FORMING A POLYSILICON RESISTOR
163、Image sensor and pixel having a polysilicon layer over the photodiode
164、Method of manufacturing a polysilicon layer and a mask used therein
165、METHOD FOR FABRICATING DOPED POLYSILICON LINES
166、Polysilicon memory element
167、Selective deposition of ZnO nanostructures on a silicon substrate using a  nickel catalyst and either patterned polysilicon or silicon surface  modification
168、Doped polysilicon via connecting polysilicon layers
169、Polysilicon conductor width measurement for 3-dimensional FETs
170、Polysilicon sidewall spacer lateral bipolar transistor on SOI
171、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR AND METHOD OF FABRICATING  LIGHTLY DOPED DRAIN THEREOF
172、METHOD OF FORMING A POLYSILICON RESISTOR
173、Large-grain p-doped polysilicon films for use in thin film transistors
174、Double layer polysilicon gate electrode
175、Lateral programmable polysilicon structure incorporating polysilicon  blocking diode
176、Method for planarizing polysilicon
177、Method and apparatus for polysilicon resistor formation
178、Diffusion barrier process for routing polysilicon contacts to a  metallization layer
179、Method to produce highly doped polysilicon thin films
180、Methods of enabling polysilicon gate electrodes for high-k gate dieletrics
181、Methods of forming semiconductor devices including removing a thickness of  a polysilicon gate layer
182、Structure for monitoring semiconductor polysilicon gate profile
183、Mask for making polysilicon structure, method of making the same, and  method of making thin film transistor using the same
184、Method of depositing polysilicon
185、Method for forming polysilicon local interconnects
186、Method for manufacturing polysilicon layer and a TFT using the same
187、A Recessed Polysilicon Gate Structure for a Strained Silicon MOSFET Device
188、Method for forming an array with polysilicon local interconnects
189、Method for forming a floating gate memory with polysilicon local  interconnects